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1. Doom.
2. Quake or Unreal Tournament.
3. Battlefield.
4. Rainbow Six.
5. Halo or Half-Life.
CoD has only been big in the last few years, and really, all that it's brought to shooters is short campaigns, good marketing, and killstreaks. Custom loadouts are nothing new. These games have left a far stronger impact on the FPS genre as a whole over a much longer time period.
Doom is, well, Doom. We wouldn't have FPSs if it weren't for Doom.
Quake and UT are the definitive high stakes arena shooters. They've left their mark on dozens of other fast paced twitch shooters.
Battlefield was among the first franchises to really take you out of warehouses and corridors and put you in a real warzone with tanks, planes, and sea craft at your disposal. Not to mention that its class system was pretty much the template for every class based shooter since.
Rainbow Six popularized the tactical shooter and marked the big change from high speed arena shooters to slower paced "thinking man's" ones on the PC. It wasn't the only tactical FPS, but it is the most recognizable.
I put Halo or Half-Life on due to both games' story element. They did a much better job of putting story front and centre in an FPS than games before it and gave you more than just a basic reason to shoot the hell out of aliens.
[Edited on 12.17.2012 4:56 PM PST]